Performance parameters
|
|
Color
|
transparent
|
Application temperature ℃
|
-10~180
|
Hardness (ShoreA)
|
57
|
Tensile strength (Mpa)
|
22.7
|
Elongation(%)
|
351
|
Modulus (100%Modulus)
|
|
Compression permanent deformation rate %(200℃ /70h)
|
|
Features
|
High purity and low emission gas do not produce particles with good plasma resistance
|
Application
|
CVD, PVD, Etch and etc
|
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